文章基本信息

标题：Automatic Release of Silicon Nanowire Arrays with a High Integrity for Flexible Electronic Devices
本地全文：下载
作者：Luo Wu ; Shuxin Li ; Weiwei He 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2014
卷号：4
DOI：10.1038/srep03940
出版社：Springer Nature
摘要：Automatic release and vertical transferring of silicon/silicon oxide nanowire arrays with a high integrity are demonstrated by an Ag-assisted ammonia etching method. By adding a water steaming step between Ag-assisted HF/H₂O₂ and ammonia etching to form a SiO_x protective layer sheathing Si nanowires, we can tune the composition of the nanowires from SiO_x (0 ≤ x ≤ 2) to Si nanowires. Ag plays a key role to the neat and uniform release of Si/SiO_x nanowire arrays from Si wafer in the ammonia etching process. The vertical Si nanowire array device, with both sides having high-quality Ohmic contact, can be transferred to arbitrary substrates, especially on a flexible substrate. The method developed here offers a facile method to realize flexible Si nanowire array functional devices.