文章基本信息

标题：Solar-Blind Photodetectors for Harsh Electronics
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作者：Dung-Sheng Tsai ; Wei-Cheng Lien ; Der-Hsien Lien 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2013
卷号：4
DOI：10.1038/srep02628
出版社：Springer Nature
摘要：We demonstrate solar-blind photodetectors (PDs) by employing AlN thin films on Si(100) substrates with excellent temperature tolerance and radiation hardness. Even at a bias higher than 200 V the AlN PDs on Si show a dark current as low as ~ 1 nA. The working temperature is up to 300°C and the radiation tolerance is up to 10¹³ cm⁻² of 2-MeV proton fluences for AlN metal-semiconductor-metal (MSM) PDs. Moreover, the AlN PDs show a photoresponse time as fast as ~ 110 ms (the rise time) and ~ 80 ms (the fall time) at 5 V bias. The results demonstrate that AlN MSM PDs hold high potential in next-generation deep ultraviolet PDs for use in harsh environments.