In the analysis of 3 dimensional solid structure, the mesh generation is always the most time consuming task and sometimes it make the analysis impossible. In this paper, the mesh generation method combined with the analysis method is considered, which digitize the 3D solid objects into voxel data, and uses the voxel data as a finite element mesh. Although this approach makes the finite element mesh generation for the solid structure with quite complicated configuration easy, it was shown that it gives artificial high stress elements around the boundary, which is resulted from the zigzag shaped boundary. Also the voxel analysis makes the number of freedom to be used in the analysis huge, and although the computational cost of analysis model generation is low, computational cost of analysis itself becomes huge. The alternative analysis method based on the multi-scale voxel data, which defines different resolution for geometric model and analysis model on the boundary are proposed. It was shown that this model gives more accurate element stiffness matrix on the boundary and gives more accurate results than conventional voxel analysis. Several examples are shown, and it was demonstrated that this analysis method reduces the whole throughput. time of the analysis of solid structure.