文章基本信息

标题：斜め成膜法により形成された吸収層をもつ低反射型ワイヤーグリッド偏光板
本地全文：下载
作者：Akio Takada ; Koji Sasaki ; Eiji Takahashi 等
期刊名称：映像情報メディア学会誌
印刷版ISSN：1342-6907
电子版ISSN：1881-6908
出版年度：2011
卷号：65
期号：10
页码：1440-1445
DOI：10.3169/itej.65.1440
出版社：The Institute of Image Information and Television Engineers
摘要：We have developed wire-grid polarizers with low reflectivity in the visible region. The polarizers consist of a bilayered structure of an absorptive layer and a (transparent) gap layer on sub-wavelength pitch gratings made of aluminum. The bilayered structure functions as a highly effective antireflection coating for wire-grid with high reflectance. In order to realize these multilayered wire-grid, the glancing angle deposition technique was used to deposit the absorptive layer just above the Al wire-grid covered with the SiO₂ gap layer. Both low reflectance and high transmittance in the desired wavelength range were achieved by optimizing the thickness of each layer.
关键词：LCDs;Wire-grid Polarizer;Anti-reflection Coating;Absorptive Layer;Glancing Angle Deposition Technique