文章基本信息

标题：ボトムコンタクト型有機TFTの特性改善とそれを用いたフレキシブル液晶表示パネルの試作
本地全文：下载
作者：藤崎好英 ; 新井俊希 ; 大竹浩等
期刊名称：映像情報メディア学会誌
印刷版ISSN：1342-6907
电子版ISSN：1881-6908
出版年度：2006
卷号：60
期号：9
页码：1428-1434
DOI：10.3169/itej.60.1428
出版社：The Institute of Image Information and Television Engineers
摘要：We developed an organic thin-film transistor (OTFT) -driven 16×16 polymer-dispersed liquid crystal (PDLC) display panel on a flexible plastic film. We fabricated low-voltage-operation bottom-contact (BC) OTFT with Ta₂O₅ gate insulator, using photolithography method. This transistor is suitable for both scaling down and increasing the number of pixels, however its performance is inferior to that of top-contact OTFT because of contamination and defects on the surface of the insulator, and leakage-current of channel region. We have reduced the current of the OTFT by optimizing the pentacene deposition area. We used O₂ plasma, UV cleaning and HMDS as surface treatments suitable for Ta₂O₅ gate insulator, to improve the characteristics. The OTFT showed a good carrier mobility of 0.3 cm²/Vs, a high current on/off ratio of over 10⁶ and a low operating drain voltage of -6V. We also successively confirmed display operation of the fabricated 16×16 PDLC display panel with a low driving voltage of 13 volts.
关键词：フレキシブルディスプレイ;フレキシブル液晶;有機TFT;五酸化タンタル;陽極酸化;低電圧動作