文章基本信息

标题：Low-reflective Wire-grid Polarizers with an Absorptive Layer Formed by Glancing Angle Deposition
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作者：Akio Takada ; Koji Sasaki ; Eiji Takahashi 等
期刊名称：Information and Media Technologies
电子版ISSN：1881-0896
出版年度：2012
卷号：7
期号：2
页码：529-534
DOI：10.11185/imt.7.529
出版社：Information and Media Technologies Editorial Board
摘要：We have developed wire-grid polarizers with low reflectivity in the visible region. The polarizers consist of a bilayered structure of an absorptive layer and a (transparent) gap layer on sub-wavelength pitch gratings made of aluminum. The bilayered structure functions as a highly effective antireflection coating for wire-grid with high reflectance. In order to realize these multilayered wire-grid, the glancing angle deposition technique was used to deposit the absorptive layer just above the Al wire-grid covered with the SiO₂ gap layer. Both low reflectance and high transmittance in the desired wavelength range were achieved by optimizing the thickness of each layer.
关键词：LCDs;Wire-grid Polarizer;Anti-reflection Coating;Absorptive Layer;Glancing Angle Deposition Technique