文章基本信息

标题：Technology theme mining of integrated circuit manufacturing industry chain based on patents
本地全文：下载
作者：Kun Hu ; Yuntao Zhang ; Danyang Ru 等
期刊名称：SHS Web of Conferences
印刷版ISSN：2416-5182
电子版ISSN：2261-2424
出版年度：2022
卷号：140
页码：1-5
DOI：10.1051/shsconf/202214001022
语种：English
出版社：EDP Sciences
摘要：Excavate and compare the technical themes of IC manufacturing industry chain of domestic and foreign patents, so as to objectively and comprehensively reveal the technical themes and differences of IC manufacturing in domestic and foreign, hoping to provide valuable reference for domestic IC manufacturing. Based on the integrated circuit manufacturing process, established the patent retrieval formula of each process and retrieved the patent data. Through TF-IDF algorithm and LDA model to mine the technical topics of domestic and foreign patents on the basis of self-built thesaurus and stop-words list, and summarized mining results. Through the analysis of results, it is found that the technical topics of integrated circuit manufacturing in domestic and foreign have similarities and differences, and the upper concept is strong, but the technical topics are more detailed of foreign patents.