文章基本信息

标题：Efect of the membrane thermodeflection on the accuracy of a tensoresistive pressure sensor
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作者：Myroslav Tykhan ; Volodymyr Mokrytskyy ; Vasyl Teslyuk 等
期刊名称：Eastern-European Journal of Enterprise Technologies
印刷版ISSN：1729-3774
电子版ISSN：1729-4061
出版年度：2017
卷号：4
期号：7
页码：32-37
DOI：10.15587/1729-4061.2017.107239
语种：English
出版社：PC Technology Center
摘要：Present work examines a contribution of the membrane thermodeflection to the temperature error of a tensoresistive pressure sensor when measuring under conditions of non-stationary thermal effect. The study is based on an analysis of the temperature field in the membrane during thermal shock. It was found that during thermal shock one observes gradients of temperature field by thickness and radius of the membrane. It is shown that the combination of these gradients generates a thermodeflection of the membrane. It was established that at such thermodeflection relative deformations on the membrane surface can be comparable with the working ones when measuring pressure. Thus, it is found that the thermodeflection is a significant factor for an increase in the temperature error of sensor.The research revealed that by minimizing heat exchange on the perimeter of sensor membrane it is possible to eliminate the gradient of temperature field along its radius. By so doing, it is possible to minimize the thermodeflection of membrane and decrease temperature error of the sensor. It is proposed to minimize heat exchange on the perimeter of membrane through the thermal insulation, or by a special selection of parameters and materials for the casing of the sensor and the membrane.
关键词：membrane;thermodeflection;pressure sensor;nonstationary temperature;measurement accuracy