文章基本信息

标题：Study of the influence of a fast-changing temperature on metrological characteristics of the tensoresistive pressure sensor
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作者：Myroslav Tykhan ; Taras Repetylo ; Ihor Dilay 等
期刊名称：Eastern-European Journal of Enterprise Technologies
印刷版ISSN：1729-3774
电子版ISSN：1729-4061
出版年度：2018
卷号：1
期号：7
页码：30-37
DOI：10.15587/1729-4061.2018.123391
语种：English
出版社：PC Technology Center
摘要：Based on dependences that describe the nonstationary temperature fields in the membrane and casing of the tensoresistive pressure sensor, we derived equations for thermomechanical processes in these elements, specifically equations of thermal deformation and thermal stresses. These equations make it possible to explore the effect of a thermal deflection in the membrane, as well as thermal stresses and thermal deformations in it, on the static and dynamic characteristics of the sensor.It is shown that the combination of thermal elastic processes in the membrane under a fast-changing effect of temperature on it significantly distorts the static and dynamic characteristics. It was established that during thermal deflection relative deformations on the surface of the membrane can be commensurate with the working deformations during pressure measurement, while a transitional characteristic of the sensor may differ from normal by up to 60 %.Our research shows that it is possible, when enabling radial thermal deformation, synchronized with the membrane of the sensor's casing, in the region of coupling with the membrane, to minimize thermal stresses in it. In addition, by minimizing the heat transfer along the perimeter of the sensor's membrane it is possible to eliminate the gradient of a temperature field along the radius. This is the way to minimize a thermal deflection of the membrane and decrease a temperature error of the sensor. Employing such measures may substantially reduce the influence of a fast-changing temperature on metrological characteristics of the sensor.
关键词：pressure sensor;membrane;fast-changing temperature;metrological characteristics