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标题：Effect of target-substrate distance on thickness and hardness of carbon thin films on SKD11 steel using target material from battery carbon rods
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作者：Aladin Eko Purkuncoro ; Rudy Soenoko ; Dionysius Joseph Djoko Herry Santjojo 等
期刊名称：Eastern-European Journal of Enterprise Technologies
印刷版ISSN：1729-3774
电子版ISSN：1729-4061
出版年度：2021
卷号：1
期号：12
页码：22-28
DOI：10.15587/1729-4061.2021.225376
语种：English
出版社：PC Technology Center
摘要：Carbon thin films on SKD11 steel were deposited by 40?kHz frequency plasma sputtering technique using a waste of battery carbon rods in argon plasma, and their mechanical properties were investigated by various target-substrate distances (1?cm, 1.7?cm, 2?cm, and 2.4?cm). The power used is 340?watts, the vacuum time is 90?minutes, and the gas flow rate is 80?ml/minute. The deposition time of carbon in plasma sputtering is 120?minutes with the initial temperature (temperature during vacuum) of 28?oC and the final temperature (the temperature after plasma sputtering) is 300?oC. The hardness value of SKD11 steel deposited with carbon thin films on SKD11 with target-substrate distance was tested using the Vickers microhardness test. Testing the thickness of the carbon thin films on the SKD11 steel substrate was carried out using a Nikon type 59520?optical microscope. Qualitative analysis of the thickness of the carbon thin films on the SKD11 steel substrate at a scale of 20?μm is shown by an optical microscope. Qualitatively, the thin film at a distance of 1.7?cm looks the brightest and thickest than other distance variations. Based on the Vickers microhardness test and Nikon type 59520?optical microscope, at the distance of 1 cm to 1.7?cm, the average thickness and hardness increased from 10,724?μm (286.6?HV) to 13,332?μm (335.9?HV). Furthermore, at the variation of the distance from 1.7 cm to 2.4 cm, the average thickness and hardness continued to decrease from 13.332?μm (335.9?HV) to 7.257?μm (257.3?HV). The possibility of interrupting atoms colliding with argon atoms in inert conditions increases at a long distance, thus causing the deposition flux on the SKD11 steel substrate to decrease.
关键词：target-substrate distance;SKD11 steel;sputtering;hardness;thickness;carbon thin films