文章基本信息

标题：Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displays
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作者：Hyojung Kim ; Jongwoo Park ; Taeyoung Khim 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2021
卷号：11
DOI：10.1038/s41598-021-87950-0
语种：English
出版社：Springer Nature
摘要：In this paper, we investigate the V th shift of p-type LTPS TFTs fabricated on a polyimide (PI) and glass substrate considering charging phenomena. The V th of the LTPS TFTs with a PI substrate positively shift after a bias temperature stress test. However, the V th with a glass substrate rarely changed even with increasing stress. Such a positive V th shift results from the negative charging of fluorine stemmed from the PI under the gate bias. In fact, the C–V characterization on the metal–insulator-metal capacitor reveals that charging at the SiO 2/PI interface depends on the applied gate bias and the PI material, which agrees well with the TCAD simulation and SIMS analyses. As a result, the charging at the SiO 2/PI interface contributes to the V th shift of the LTPS TFTs leading to image sticking.