文章基本信息

标题：Towards the Analogy of Electrostatic and Electromagnetic Transducers
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作者：Richard Schroedter ; Ernst Csencsics ; Georg Schitter 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2020
卷号：53
期号：2
页码：8941-8946
DOI：10.1016/j.ifacol.2020.12.1423
语种：English
出版社：Elsevier
摘要：AbstractElectromechanical, or mechatronic, transducers exchange energy between the mechanical and electrical domain via electrostatic and electromagnetic transduction principles, which are the basis for actuators and sensors. This paper reveals the simple analogy between electrostatic and electromagnetic transducers. Summarizing the well-known Gauß, Ampère’s, Ohm’s, Chua’s, Newton’s, Hook’s and the damping laws into a signal-flow diagram with linearized coefficients, the model shows the transducers reciprocity and physical behavior of damped spring-mass mechatronic systems. The presented modeling approach simplifies the derivation of transfer functions, the pull-in phenomenon, and the coupling factors for the design of feedback methods for mechatronic systems. The analogies are shown by comparing an electrostatic and an electromagnetic parallel-plate actuator, represented by a torsional MEMS scanning mirror and a hybrid reluctance fast steering mirror, respectively. The paper discusses the actuators performance and compares the transducer coefficients and the intrinsic stiffness regarding pull-in.
关键词：KeywordsGeneric Mechatronic Transducer ModelElectromechanical AnalogyTorsional Parallel-Plate Actuator