文章基本信息

标题：Control of the Vertical Gradient Freeze crystal growth process via backstepping
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作者：Stefan Ecklebe ; Frank Woittennek ; Jan Winkler 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2020
卷号：53
期号：2
页码：7758-7764
DOI：10.1016/j.ifacol.2020.12.1537
语种：English
出版社：Elsevier
摘要：AbstractThis contribution presents a backstepping-based state feedback design for the tracking control of a two-phase Stefan problem which is encountered in the Vertical Gradient Freeze crystal growth process. A two-phase Stefan problem consists of two coupled free boundary problems and is a vital part of many crystal growth processes due to the time-varying extent of crystal and melt during growth. In addition, a different approach for the numerical approximation of the backstepping transformations kernel is presented.
关键词：KeywordsVertical Gradient Freezetwo-phase Stefan problemdistributed-parameter systemsbacksteppingtracking controlnumerical methods