文章基本信息

标题：Efficient Temperature Profile Estimation for Silicon Wafers based on Subspace Observers ⁎
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作者：Markus Tranninger ; Richard Seeber ; Martin Steinberger 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2020
卷号：53
期号：2
页码：5952-5957
DOI：10.1016/j.ifacol.2020.12.1648
语种：English
出版社：Elsevier
摘要：AbstractThis work proposes a computationally efficient observation algorithm for the surface temperature profile of heated silicon wafers. The observer exploits the fact that only a few modes of the original large-order model are unstable or slowly converging. In this case, it suffices to modify only these modes by the observer’s output feedback gain. Compared to classical observation techniques, the proposed method allows to compute the feedback gain for a state space of lower dimension, which reduces computational complexity. A comparison of the approach with the extended Kalman-Bucy filter using experimental data shows its appealing performance.
关键词：KeywordsSubspace Observer DesignLyapunov ExponentsNonlinear SystemsExtended Kalman-Bucy FilterLinear Time Varying SystemsReduced Riccati EquationWafer Temperature EstimationRapid Thermal Processing