摘要:AbstractThe accuracy of micro-electro-mechanical systems (MEMS) gyroscopes is sensitive to variations of the drive mode resonance frequency ω0. To tackle this problem, we propose anH∞control, which explicitly depends onω0and guarantees, with reduced conservatism, a specified level of performance of the drive mode. We consider the design of continuous- and discrete-time controllers. We then propose a method based on the µ-analysis to validate the performance of drive mode control even if the frequencyω0is not perfectly measured. Numerical examples confirm the effectiveness of our approach.