文章基本信息

标题：Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Monitoring of Process-induced Particles
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作者：Gibaek Kim ; Kyoungtae Kim ; Hyunok Maeng 等
期刊名称：Aerosol and Air Quality Research
印刷版ISSN：1680-8584
出版年度：2019
卷号：19
期号：3
页码：455-460
DOI：10.4209/aaqr.2018.08.0312
语种：English
出版社：Chinese Association for Aerosol Research in Taiwan
摘要：Laser-induced breakdown spectroscopy (LIBS) has been increasingly used in recent years to rapidly detect the elemental compositions of various materials in different media (i.e., solids, liquids, and gases). In this study, an aerosol-LIBS system was developed for the real-time monitoring of process-induced particles generated during semiconductor manufacturing. The developed system consists primarily of a laser, a spectrometer, optics, and an aerosol chamber; the last element was constructed for the application of the aerosol-LIBS to various semiconductor manufacturing processes and comprises exhaust tubes and low pressure and high temperature chambers. The system was evaluated for its sensitivity to various elements using laboratory-generated aerosols and successfully detected P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines. Further evaluation of the aerosol-LIBS is ongoing.
关键词：Laser-induced breakdown spectroscopy (LIBS);Process-induced particles;Real-time monitoring;Spectrometer