文章基本信息

标题：Dual-MWCNT Probe Thermal Sensor Assembly and Evaluation Based on Nanorobotic Manipulation inside a Field-Emission-Scanning Electron Microscope
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作者：Zhan Yang ; Pengbo Wang ; Yajing Shen 等
期刊名称：International Journal of Advanced Robotic Systems
印刷版ISSN：1729-8806
电子版ISSN：1729-8814
出版年度：2015
卷号：12
DOI：10.5772/59932
语种：English
出版社：SAGE Publications
摘要：We report a thermal sensor composed of two multiwalled carbon nano-tubes (MWCNTs) inside a field-emission-scanning electron microscope. The sensor was assembled using a nanorobotic manipulation system, which was used to construct a probe tip in order to detect the local environment of a single cell. An atomic force microscopy (AFM) cantilever was used as a substrate; the cantilever was composed of Si₃N₄ and both sides were covered with a gold layer. MWCNTs were individually assembled on both sides of the AFM cantilever by employing nanorobotic manipulation. Another AFM cantilever was subsequently used as an end effector to manipulate the MWCNTs to touch each other. Electron-beam-induced deposition (EBID) was then used to bond the two MWCNTs. The MWCNT probe thermal sensor was evaluated inside a thermostated container in the temperature range from 25°C to 60°C. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR).
关键词：Nanorobotic Manipulation; MWCNT; Thermal Sensor; FESEM