文章基本信息

标题：Recent Advances in the Control of Piezoelectric Actuators
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作者：Ziqiang Chi ; Qingsong Xu
期刊名称：International Journal of Advanced Robotic Systems
印刷版ISSN：1729-8806
电子版ISSN：1729-8814
出版年度：2014
卷号：11
DOI：10.5772/59099
语种：English
出版社：SAGE Publications
摘要：The micro/nano positioning field has made great progress towards enabling the advance of micro/nano technology. Micro/nano positioning stages actuated by piezoelectric actuators are the key devices in micro/nano manipulation. The control of piezoelectric actuators has emerged as a hot topic in recent years. Piezoelectric materials have inherent hysteresis and creep nonlinearity, which can reduce the accuracy of the manipulation, even causing the instability of the whole system. Remarkable efforts have been made to compensate for the nonlinearity of piezoelectric actuation through the mathematical modelling and control approaches. This paper provides a review of recent advances on the control of piezoelectric actuators. After a brief introduction of basic components of typical piezoelectric micro/nano positioning platforms, the working principle and modelling of piezoelectric actuators are outlined in this paper. This is followed with the major control method and recent progress is presented in detail. Finally, some open issues and future work on the control of piezoelectric actuators are extensively discussed.
关键词：Piezoelectric actuator; micro/nano positioning stage; hysteresis nonlinearity; control algorithm; dynamic modelling