文章基本信息

标题：A Dual-Axis Electrostatically Driven MEMS Microgripper
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作者：Yukun Jia ; Minping Jia ; Qingsong Xu 等
期刊名称：International Journal of Advanced Robotic Systems
印刷版ISSN：1729-8806
电子版ISSN：1729-8814
出版年度：2014
卷号：11
DOI：10.5772/59677
语种：English
出版社：SAGE Publications
摘要：This paper presents the design of a new monolithic two-axis electrostatically actuated MEMS microgripper with integrated capacitive position and force sensors working at the micro-scale level. Each of the two jaws of the microgripper possesses two degrees-of-freedom (DOF) and is capable of positioning in both x-and y-axes. Unlike existing works, where one gripper arm is actuated and other one is sensed, both arms of the proposed microgripper are actuated and sensed independently. A sensing scheme is constructed to provide the position and force signals in the noncontact and contact phases, respectively. By applying a 120V driving voltage, the jaw can provide 70 μm x-axis and 18 μm y-axis displacements with the force of 190 μN. By this design, the real-time position and grasping force information can be obtained in the dual sensing mode. Both analytical calculation and finite-element analysis (FEA) were performed to verify the performance of the proposed design. A scaled-up prototype is designed, fabricated and tested through the experiment to verify the structure design of the microgripper.
关键词：MEMS; Microgripper; Electrostatic Actuator; Capacitive Sensor