文章基本信息

标题：MEMS Test Bench and its Uncertainty Analysis for Evaluation of MEMS Mirrors ⁎
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作者：Han Woong Yoo ; David Brunner ; Thomas Thurner 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2019
卷号：52
期号：15
页码：49-54
DOI：10.1016/j.ifacol.2019.11.648
语种：English
出版社：Elsevier
摘要：AbstractThis paper proposes a MEMS test bench to ensure highly accurate and precise angle measurements for evaluation of multiple MEMS mirrors and analyzes its measurement uncertainty. The MEMS test bench includes a position sensitive detector (PSD) with a motorized stage to convert the beam displacement on the PSD to a mirror angle measurement by a dedicated calibration procedure. Uncertainties in the angle measurement of the MEMS mirrors are analyzed considering the optical alignment, the characterization of the PSD, and the calibration data. By the proposed uncertainty analysis, the accuracy of the developed MEMS test bench shows up to 0.026° at the mirror angle of 15°.
关键词：KeywordsMetrologyUncertainty analysisCharacterizationMicroelectromechanical systems (MEMS)MEMS mirror