文章基本信息

标题：RESIDUAL STRESS IN A THIN-FILM MICROOPTOELECTROMECHANICAL (MOEMS) MEMBRANE
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作者：Malinauskas K. ; Ostaševičius V. ; Daukševičius R. 等
期刊名称：Mechanika
印刷版ISSN：1392-1207
出版年度：2012
卷号：18
期号：3
页码：273-279
DOI：10.5755/j01.mech.18.3.1880
语种：English
出版社：Kauno Technologijos Universitetas
摘要：Residual stress from the thin film deposition process can have extremely important effects on the functionality and reliability of MOEMS devices. Almost all surface-micromachined thin films are subject to residual stresses. The most common is thermal stress, which accompanies a change in temperature when thin-film is evaporated on substrate and when it cools down to room temperature. This paper presents the surface-micro-machined micromembrane micromachining technology. The principle scheme of the object is presented and working principle of micromembrane is described. Furthermore, using powerful modeling software Comsol Multiphysics comparison of eigenfrequencies of structure with thermal stresses and without it is presented. A possible problem solution will also be included.
关键词：MOEMS; Residual stresses; thermal stress; eigenfrequencies with and without residual stresses