文章基本信息

标题：Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device
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作者：Anton Köck ; Marco Deluca ; Florentyna Sosada-Ludwikowska 等
期刊名称：Proceedings
电子版ISSN：2504-3900
出版年度：2019
卷号：14
期号：1
页码：5
DOI：10.3390/proceedings2019014005
语种：English
出版社：MDPI AG
摘要：A worldwide unique CMOS based chemical sensor device comprising an array of 8 microhotplates (µhps) for a total of 16 chemical sensors has been fabricated (Figure 1). [...]