文章基本信息

标题：Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite
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作者：Tasuku Nakahara ; Junya Suzuki ; Yuki Hosokawa 等
期刊名称：Maine Policy Review
印刷版ISSN：2312-7481
出版年度：2018
卷号：4
期号：1
页码：7
DOI：10.3390/magnetochemistry4010007
语种：English
出版社：The University of Maine
摘要：Microvalves play an important role in fluid control in micro total analysis systems (µTAS). Previous studies have reported complex fabrication processes for making microvalve elements in a channel. Hence, there is a need for a simpler microvalve fabrication method for achieving throughput improvement and cost reduction in µTAS. In this study, we propose a simple fabrication method for a magnetically driven microvalve array using a photosensitive composite. The composite was prepared by mixing a photoresist and magnetic particles of pure iron. The simple fabrication process was performed by using a laminating layer composed of a sacrificial part and the composite in a channel. The microvalve elements were fabricated by one-step photolithography using the processability of the sacrificial layer and composite. Further, we demonstrated the magnetic driving property of the fabricated microvalve array device. Compared to devices containing non-driving microvalves, the flow rate was decreased by 50%, and the pressure difference between the inlet and outlet increased by up to 4 kPa with increase in driving microvalve elements. These results imply that our proposed device could be useful for practical µTAS applications.