文章基本信息

标题：Effects of substrate temperature on the properties of the indium tin oxide thin films deposited by sputtering method
本地全文：下载
作者：Chia-Ching Wu ; Chien-Chen Diao
期刊名称：MATEC Web of Conferences
电子版ISSN：2261-236X
出版年度：2018
卷号：185
DOI：10.1051/matecconf/201818500006
语种：English
出版社：EDP Sciences
摘要：High-quality transparent conductive indium tin oxide (ITO) thin films were deposited on glass substrates using radio frequency sputtering method. The structure and electrical and optical properties of the ITO thin films were mainly investigated. The ITO thin films showed strong diffraction peak having a preferred orientation along the [111] direction as the deposition temperature at 120 to 160 °C. In the transmission spectra, the optical transmittance increased in the visible range as the deposition temperature increased from RT to 160 °C. A minimum resistivity of 3.06×10-3Ω-cm was obtained for the ITO thin film deposition at 160 °C.