文章基本信息

标题：High-throughput patterning of photonic structures with tunable periodicity
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作者：Thomas J. Kempa ; D. Kwabena Bediako ; Sun-Kyung Kim 等
期刊名称：Proceedings of the National Academy of Sciences
印刷版ISSN：0027-8424
电子版ISSN：1091-6490
出版年度：2015
卷号：112
期号：17
页码：5309-5313
DOI：10.1073/pnas.1504280112
语种：English
出版社：The National Academy of Sciences of the United States of America
摘要：SignificancePatterning large substrate areas with arrays of submicrometer structures in a facile, reliable, and timely manner is important for fabrication of optical elements that capture, guide, and convert light. RIPPLE (reactive interface patterning promoted by lithographic electrochemistry) is an electrochemical patterning method that is demonstrated for the rapid fabrication of periodic arrays of metallic circular Bragg gratings over large substrate areas. The grating period can be tuned in situ over micrometer and submicrometer length scales in a high-throughput fashion. We have identified point-like and annular scattering modes at different planes above the structured surface, suggesting the potential to use such structures to control the propagation of light. The described methods may be useful for high-throughput fabrication of sensors and light-management elements for energy conversion applications. A patterning method termed "RIPPLE" (reactive interface patterning promoted by lithographic electrochemistry) is applied to the fabrication of arrays of dielectric and metallic optical elements. This method uses cyclic voltammetry to impart patterns onto the working electrode of a standard three-electrode electrochemical setup. Using this technique and a template stripping process, periodic arrays of Ag circular Bragg gratings are patterned in a high-throughput fashion over large substrate areas. By varying the scan rate of the cyclically applied voltage ramps, the periodicity of the gratings can be tuned in situ over micrometer and submicrometer length scales. Characterization of the periodic arrays of periodic gratings identified point-like and annular scattering modes at different planes above the structured surface. Facile, reliable, and rapid patterning techniques like RIPPLE may enable the high-throughput and low-cost fabrication of photonic elements and metasurfaces for energy conversion and sensing applications.
关键词：nanopattern ; electrochemistry ; photonics ; silicon ; nanofabrication