文章基本信息

标题：Continuous compliance compensation of position-dependent flexible structures
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作者：Nikolaos Kontaras ; Marcel Heertjes ; Hans Zwart 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2016
卷号：49
期号：13
页码：76-81
DOI：10.1016/j.ifacol.2016.07.930
语种：English
出版社：Elsevier
摘要：AbstractThe implementation of lightweight high-performance motion systems in lithography and other applications imposes lower requirements on actuators, amplifiers, and cooling. However, the decreased stiffness of lightweight designs increases the effect of structural flexibilities especially when the point of interest is not at a fixed location. This is for example occurring when exposing a silicon wafer. The present work addresses the problem of compliance compensation in flexible structures, when the performance location is time-varying. The compliance function is derived using the frequency domain representation of the solution of the partial differential equation (PDE) describing the structure. The method is validated by simulation results.
关键词：Keywordspartial differential equationPDEflexible structuresEuler-Bernoulli beamfeedforwardcompliance compensation