文章基本信息

标题：Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner
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作者：Michael G. Ruppert ; Mohammad Maroufi ; Ali Bazaei 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2017
卷号：50
期号：1
页码：15554-15560
DOI：10.1016/j.ifacol.2017.08.1879
语种：English
出版社：Elsevier
摘要：AbstractWe demonstrate a novel tracking controller formulation based on a linear time-varying Kalman filter to regulate amplitude and phase of a reference signal independently. The method is applicable to sinusoidal references such as spiral, cycloid and Lissajous trajectories which are commonly used for imaging in high-speed Atomic Force Microscopy (AFM). A Microelectromechanical Systems (MEMS) based nanopositioner, whose fundamental resonance frequency is dampened with an additional damping feedback loop, is employed. For a scan range of 2µm, we demonstrate experimental tracking of sinusoids with frequencies as high as 5kHz, well beyond the open-loop fundamental resonance, with a tracking error of only 4.6 nm.
关键词：KeywordsMicrosystemsMicroNano Mechatronic SystemsPositioning SystemsKalman filtersTracking