文章基本信息

标题：On nanopositioning control of a cantilever with electrostatic actuation and tunneling current sensing based on multi-mode modelling
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作者：Alina Voda ; Gildas Besançon ; Łukasz Ryba 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2017
卷号：50
期号：1
页码：15548-15553
DOI：10.1016/j.ifacol.2017.08.1876
语种：English
出版社：Elsevier
摘要：AbstractConsidering a cantilever motion subject to electrostatic actuation and tunneling current sensing, a multi-mode model is first analyzed, with an emphasis on the effect of actuator/sensor location. In particular, it is underlined how specific locations can result in a model of reduced order, making in turn a related control design more simple. This is then illustrated by a robust control scheme aiming at positioning the cantilever. This control in particular handles the effect of proximity forces, and the results are illustrated in simulation.
关键词：KeywordsMulti-mode modelcantilever motionelectrostatic actuationtunneling currentrobust controlproximity force