文章基本信息

标题：A Self-Designed Laser Scanning Differential Confocal Microscopy with a Novel Vertical Scan Algorithm for Fast Image Scanning
本地全文：下载
作者：Wei-Chih Liu ; Meng-Hao Chou ; Kuang-Yao Chang 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2017
卷号：50
期号：1
页码：3221-3226
DOI：10.1016/j.ifacol.2017.08.446
语种：English
出版社：Elsevier
摘要：AbstractLaser confocal microscopy (LCM) is a versatile instrument in the modern engineering fields. Such powerful tool can be used to accurately obtain the topography of micro and submicro-fabricated structures or to reconstruct 3-D profile of the biological cell. Whereas, there still exists vertical speed limitation in this inspection instrument such that people can’t quickly obtain a high-precision 3-D topography. In this paper, a homemade laser scanning differential confocal microscopy (LSDCM) combined with a vertical scan algorithm is proposed to address the scanning time limitation in the LCM area. With the proposed vertical scan algorithm, the vertical scan speed and scanning accuracy can be simultaneously guaranteed. The impressive experimental results validate the feasibility of the proposed system.
关键词：KeywordsLaser confocal microscopyDifferential confocal microscopyPiezoelectric stage