文章基本信息

标题：Study on ringing effect in ultrasonic transducer
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作者：M. S. Salim ; M. F. Abd Malek ; Naseer Sabri 等
期刊名称：Scientific Research and Essays
印刷版ISSN：1992-2248
出版年度：2012
卷号：7
期号：43
页码：3682-3689
DOI：10.5897/SRE11.1489
语种：English
出版社：Academic Journals
摘要：This paper presents theoretical experimental and evidence of the effect of internal resonance at silicon substrate in micro fabrication ultrasonic transducer. This ringing is clearly observed in immersion transducers with 4.2 MHz and harmonics. A mathematical analytical model of the attenuation yield by ringing effective and simulation is introduced. Experimental results are further compared to simulations carried out in time-domain and qualitative agreement is provided. This paper summarizes the theoretical measured, performance backing layer. Experiment and simulation proved that it is possible to design a custom backing material with acoustic impedance that decreases the ringing mode.
关键词：Capacitive micro-machined ultrasonic transducers (CMUT); ultrasound sensor; backing layer; attenuation