文章基本信息

标题：Flexure design for precision positioning using low-stiffness actuators
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作者：Shingo Ito ; Shingo Ito ; Francesco Cigarini 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2016
卷号：49
期号：21
页码：200-205
DOI：10.1016/j.ifacol.2016.10.548
语种：English
出版社：Elsevier
摘要：Abstract: This paper analytically investigates flexures to mechanically guide the moving part of a precision positioning system actuated by Lorentz actuators, where the control bandwidth is typically restricted by the second or higher mechanical resonances that can include internal modes of the positioning mass. Based on analytical models, mechanical resonant frequencies are derived for a given set of parameters to determine flexure dimensions and material. As a result of the derivation and analysis, a model is proposed to predict this second resonant frequency for a given first resonant frequency to achieve better control design and performance. As the verification, the effectiveness of the proposed model is confirmed by using Finite Element Analysis (FEA), as well as an experimental setup for frequency response.
关键词：KeywordsFlexureLorentz actuatorvoice coil motorprecision positioning