文章基本信息

标题：A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation
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作者：Xiaobo Zhu ; Xiaobo Zhu ; Zhijie Wen 等
期刊名称：MATEC Web of Conferences
电子版ISSN：2261-236X
出版年度：2016
卷号：77
页码：1-4
DOI：10.1051/matecconf/20167701040
语种：English
出版社：EDP Sciences
摘要：This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two kinds of flexure-based input/output decoupling modules have been developed to achieve a large stroke and precise positioning. The analytical modelling and finite element analysis are given to validate the mechanical performance and a prototype of the proposed stage is fabricated for performance tests. The experimental results show that the developed stage has the travel stroke of 214 μm with a resolution of 8 nm. It is demonstrated that the stage can be adequate for micro/nano manipulation.